In this study, we research about comb-drive micro-structure, which is a\nMEMS device used to measure velocities and accelerations. To ensure the accuracy\nand visualization of the result, we simulate the dynamics of the comb\ndrive using COMSOL Multiphysics, meanwhile introducing the concept of\nre-meshing. We aim to find the optimal comb-drive-building material, which\ncan provide the device with the most desirable first eigenfrequency. According\nto the optimization process, silver is the most suitable construction material.\nAfterwards, the electric responses of both the optimized device and the\npre-optimized one are analyzed in frequency domain and stationary study.\nWe conclude that the capacitance change is positively related to frequency in a\nlinear manner, and that the optimized device has a larger increment of both\ndisplacement and capacitance per unit of frequency change than the pre-optimized\none, showing that the optimization of material realizes our goal of enhancing\nelectrical performance.
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